The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Jan. 25, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Shiva K. T. Rajavelu Muralidhar, Tempe, AZ (US);
Youness Alvandi-Tabrizi, Tempe, AZ (US);
John DiSanto, Scottsdale, AZ (US);
Sam Kim, Chandler, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/59 (2006.01); G01N 21/958 (2006.01); G01B 11/02 (2006.01); G01N 33/207 (2019.01);
U.S. Cl.
CPC ...
G01N 21/59 (2013.01); G01B 11/028 (2013.01); G01N 21/958 (2013.01); G01N 33/207 (2019.01); G01N 2201/021 (2013.01);
Abstract
Methods and apparatus for measuring light intensity are disclosed. The methods and apparatus can be used to verify an article, such as a reaction chamber. Exemplary apparatus include a first arm, a light source coupled to the first arm, a second arm, and a sensor coupled to the second arm. The sensor can receive light from the light source that is transmitted through at least a portion of the article.