The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Dec. 10, 2020
Interface Technology (Chengdu) Co., Ltd., Chengdu, CN;
Interface Optoelectronics (Shenzhen) Co., Ltd., Shenzhen, CN;
General Interface Solution Limited, Miaoli County, TW;
Po-Lun Chen, Shenzhen, CN;
Chun-Ta Chen, Shenzhen, CN;
Tsung-Chen Chou, Shenzhen, CN;
Chin-Yang Wu, Shenzhen, CN;
Nai-Hau Shiue, Shenzhen, CN;
Interface Technology (Chengdu) Co., Ltd., Chengdu, CN;
Interface Optoelectronics (Shenzhen) Co., Ltd., Guangdong, CN;
General Interface Solution Limited, Miaoli County, TW;
Abstract
A sputtering system is suitable for sputtering a surface to be sputtered having sections. Each section has a projection height. The sputtering system includes a supporting plate, a sputtering array, and a controller. The sputtering array is arranged on the supporting plate. The sputtering array includes sputtering units. Each section corresponds to at least one of the sputtering units. Each sputtering unit has a driving shaft and a target. The target faces the surface to be sputtered. The controller is electrically connected the driving shaft. The driving shaft drives the target to move relative to the surface to be sputtered. The controller controls a distance between each sputtering unit and the corresponding section of the sections in the direction of the projection height to satisfy a given condition.