The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Apr. 04, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Sivapackia Ganapathiappan, Los Altos, CA (US);
Boyi Fu, San Jose, CA (US);
Ashwin Chockalingam, Santa Clara, CA (US);
Ankit Vora, Bothell, WA (US);
Daniel Redfield, Morgan Hill, CA (US);
Rajeev Bajaj, Fremont, CA (US);
Nag B. Patibandla, Pleasanton, CA (US);
Hou T. Ng, Campbell, CA (US);
Sudhakar Madhusoodhanan, Pleasanton, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one implementation, a method of forming a porous polishing pad is provided. The method comprises depositing a plurality of composite layers with a 3D printer to reach a target thickness. Depositing the plurality of composite layers comprises dispensing one or more droplets of a curable resin precursor composition onto a support. Depositing the plurality of composite layers further comprises dispensing one or more droplets of a porosity-forming composition onto the support, wherein at least one component of the porosity-forming composition is removable to form the pores in the porous polishing pad.