The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Nov. 10, 2019
Applicant:
Mems Drive (Nanjing) Co., Ltd., Nanjing, CN;
Inventors:
Guiqin Wang, Arcadia, CA (US);
Xiaolei Liu, South Pasadena, CA (US);
Mahmood Samiee, Glendale, CA (US);
Yufeng Wang, Pasadena, CA (US);
Assignee:
MEMS Drive (Nanjing) Co., Ltd., Nanjing, CN;
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H10N 30/20 (2023.01); H10N 30/04 (2023.01); H10N 30/06 (2023.01); H10N 30/076 (2023.01); H10N 30/077 (2023.01); H10N 30/082 (2023.01);
U.S. Cl.
CPC ...
H10N 30/2047 (2023.02); H10N 30/04 (2023.02); H10N 30/06 (2023.02); H10N 30/076 (2023.02); H10N 30/077 (2023.02); H10N 30/082 (2023.02);
Abstract
A method of generating a piezoelectric actuator includes: forming a piezoelectric member upon a rigid substrate; and removing one or more portions of the rigid substrate to form one or more gaps in the rigid substrate, thus defining at least one deformable portion of the piezoelectric member and at least one rigid portion of the piezoelectric member.