The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2023

Filed:

May. 26, 2021
Applicant:

Samsung Display Co., Ltd., Yongin-Si, KR;

Inventors:

Moonsung Kim, Yongin-si, KR;

Younggil Park, Yongin-si, KR;

Jaebum Han, Yongin-si, KR;

Sooim Jeong, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-Si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10K 59/124 (2023.01); H10K 71/00 (2023.01);
U.S. Cl.
CPC ...
H10K 59/124 (2023.02); H10K 71/00 (2023.02);
Abstract

An embodiment of a display apparatus includes a substrate, a buffer layer on the substrate, a thin film transistor including a semiconductor layer disposed on the buffer layer and including a silicon semiconductor, and a gate electrode insulated from the semiconductor layer, and an insulating layer covering the semiconductor layer, in which a concentration of fluorine at an interface between the semiconductor layer and the buffer layer is at least 10% of a concentration of the fluorine at the interface between the semiconductor layer and the insulating layer.


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