The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2023

Filed:

Feb. 19, 2021
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Saravanan Marimuthu, Bangalore, IN;

De Lu, San Diego, CA (US);

Baldeo Sharan Sharma, Bangalore, IN;

Peeyush Kumar Parkar, Bangalore, IN;

Venkat Narayanan, San Diego, CA (US);

Rui Li, San Diego, CA (US);

Samy Shafik Tawfik Zaynoun, San Diego, CA (US);

Min Chen, San Diego, CA (US);

David Kidd, San Diego, CA (US);

Amit Patil, Bengaluru, IN;

Assignee:

QUALCOMM INCORPORATED, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G06F 30/398 (2020.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); G06F 30/398 (2020.01); H01L 22/34 (2013.01);
Abstract

Aspects of the disclosure are directed to sensing integrated circuit (IC) Back End Of Line (BEOL) process corners. In one aspect, an apparatus for sensing IC BEOL process corners includes a ring oscillator including a plurality of ring oscillator stages configured to generate an output waveform with a frequency state; and a shield net circuit including a plurality of shield net stages corresponding to the plurality of ring oscillator stages, the shield net circuit having a toggle input. And, a method includes generating an output waveform with a frequency state using a ring oscillator that includes a plurality of ring oscillator stages; modifying a plurality of ring oscillator stage time delays through a coupling between a plurality of shield net stages and the plurality of ring oscillator stages; and selecting the frequency state using a toggle input of a shield net circuit which includes the plurality of shield net stages.


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