The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Apr. 07, 2021
Applicant:
Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;
Inventors:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/02 (2006.01); B05B 7/26 (2006.01); B05B 13/04 (2006.01); B05B 13/02 (2006.01); B05B 12/14 (2006.01); B05B 12/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); B05B 7/26 (2013.01); B05B 12/1472 (2013.01); B05B 13/0228 (2013.01); B05B 13/04 (2013.01); B05B 13/0405 (2013.01); B08B 3/02 (2013.01); B08B 3/022 (2013.01); B08B 3/024 (2013.01); H01L 21/67253 (2013.01); B05B 12/04 (2013.01); B05B 12/1418 (2013.01);
Abstract
A spray device includes a spray assembly. The spray assembly is configured to spray cleaning liquid towards a to-be-cleaned surface of a to-be-processed workpiece. The spray assembly includes a spray head and multiple liquid inlet pipelines. The spray assembly is configured to spray cleaning liquids with different concentrations, temperatures, and/or flow rates corresponding to different positions in a radial direction of the to-be-cleaned surface to cause a cleaning rate of the cleaning liquids at the different positions in the radial direction of the to-be-cleaned surface to be consistent.