The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Mar. 04, 2022
Applicant:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Inventor:
Hironobu Yabuta, Tokyo, JP;
Assignee:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H05G 2/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70916 (2013.01); G03F 7/70033 (2013.01); H05G 2/005 (2013.01); H05G 2/008 (2013.01);
Abstract
A foil trap that captures debris released from a plasma includes a hub structure, a plurality of foils, and a shield member. The hub structure has a circumferential surface portion and a front surface portion facing the plasma. The foils are arranged radially around the hub structure and are supported by brazing on the circumferential surface portion. The shield member is disposed on the front surface portion, has a circumferential edge portion that shields the circumferential surface portion from the plasma, and forms a thermal resistance section between the shield member and the hub structure.