The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Apr. 16, 2021
Sumitomo Chemical Company, Limited, Tokyo, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
A salt represented by formula (I), an acid generator and a resist composition: wherein R, Rand Reach represent a hydroxy group, —O—R, —O—CO—O—Ror —O-L-CO—O—R, Lrepresents an alkanediyl group, R, R, R, R, Rand Reach represent a halogen atom, an alkyl fluoride group or a hydrocarbon group, Rrepresents an acid-labile group, X, Xand Xeach independently represent an oxygen atom or a sulfur atom, m1 is an integer of 1 to 5, m2, m3, m8 and m9 represent an integer of 0 to 5, m4, m5, m6 and m7 represent an integer of 0 to 4, in which 1≤m1+m7≤5, 0≤m2+m8≤5, 0≤m3+m9≤5, and AIrepresents an organic anion.