The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
May. 12, 2022
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01);
Abstract
The present invention provides a mold including a pattern to be transferred to an imprint material on a substrate using an imprint apparatus, the mold including: a pattern region in which the pattern is arranged; and a peripheral region surrounding the pattern region and configured to shield light, wherein the pattern region includes a first portion, which is arranged with a mark used to measure a relative position with respect to a substrate mark provided on the substrate and through which an image of the substrate mark passes, and a second portion through which an image of a stage mark provided on a stage holding the substrate passes.