The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Jul. 14, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Shinichi Shudo, Saitama, JP;
Toshiaki Suzuya, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus for performing imprint processing of forming a pattern of an imprint material on a substrate by using a mold, the imprint apparatus including a forming unit including an outlet configured to blow out a gas towards the substrate side from the mold side and configured to form, by the gas, an air flow that surrounds a space between the mold and the substrate, and a control unit configured to control the forming unit when the imprint processing is consecutively performed on a plurality of shot regions on the substrate after an uncured imprint material has been supplied thereto.