The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Feb. 05, 2022
Applicant:
J.a. Woollam Co., Inc., Lincoln, NE (US);
Inventors:
Stefan Schoeche, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Steven E. Green, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
James D. Welch, Omaha, NE (US);
Assignee:
J.A. WOOLLAM CO., INC., Lincoln, NE (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/21 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01N 2201/021 (2013.01); G01N 2201/06113 (2013.01); G01N 2201/12 (2013.01);
Abstract
An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.