The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
May. 22, 2020
Buerkert Werke Gmbh & Co. KG, Ingelfingen, DE;
Burkert S.a.s., Triembach-au-Val, FR;
Andreas Doerr, Ingelfingen, DE;
Tanja Hertweck, Ingelfingen, DE;
Jan Magnussen, Ingelfingen, DE;
Juergen Wiedemann, Ingelfingen, DE;
Armin Arnold, Ingelfingen, DE;
Frederic Heinrich, Ingelfingen, DE;
Abstract
A mass flow sensor assembly for a mass flow controller or a mass flow meter comprises a mass flow sensor comprising a capillary tube held by a first corner support and a second corner support formed separately from each other. The capillary tube comprises a sensor portion which is located between the two corner supports, and wherein the two corner supports each have an arc-shaped groove in which the capillary tube is partially received. In addition, a method of manufacturing a mass flow sensor assembly is described.