The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2023

Filed:

Oct. 04, 2021
Applicant:

The Regents of the University of California, Oakland, CA (US);

Inventors:

Yi-Hsien Lu, El Cerrito, CA (US);

Xiao Zhao, El Cerrito, CA (US);

Matthijs van Spronsen, Berkeley, CA (US);

Adam Schwartzberg, Richmond, CA (US);

Miquel Salmeron, Kensington, CA (US);

Carlos Morales Sanchez, Cottbus, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/02 (2006.01); C23C 16/04 (2006.01); C23C 16/455 (2006.01); C23C 16/01 (2006.01); G01N 21/3577 (2014.01); G01N 21/35 (2014.01); G01Q 60/24 (2010.01); G01Q 60/36 (2010.01);
U.S. Cl.
CPC ...
C23C 16/40 (2013.01); C23C 16/01 (2013.01); C23C 16/0281 (2013.01); C23C 16/045 (2013.01); C23C 16/45536 (2013.01); G01N 21/3577 (2013.01); G01N 2021/3595 (2013.01); G01Q 60/24 (2013.01); G01Q 60/366 (2013.01);
Abstract

This disclosure provides systems, methods, and apparatus related to thin free-standing oxide membranes. In one aspect, a method includes providing a substrate. The substrate defines a hole having a diameter of about 500 nanometers to 5000 nanometers. A layer of metal is deposited on the substrate. A supporting layer is deposited on the layer of metal. A first side of the supporting layer is the side that is disposed on the layer of metal. A metal oxide layer is deposited on the first side of the supporting layer and on the substrate. In some implementations, the method further includes removing the supporting layer.


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