The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
May. 13, 2019
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Inventors:
Matti Liukku, Helsinki, FI;
Ville-Pekka Rytkönen, Klaukkala, FI;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); G01P 15/125 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0016 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0882 (2013.01);
Abstract
A capacitive microelectromechanical acceleration sensor where one or more rotor measurement plates and one or more stator measurement plates are configured so that the movement of a proof mass in the direction of a sense axis can be measured in a capacitive measurement conducted between them. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates which are orthogonal to a first damping axis, and the first damping axis is substantially orthogonal to the sense axis.