The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Mar. 28, 2017
L'air Liquide Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Toshiyuki Nakagawa, Hyogo, JP;
Kouki Morimoto, Tokyo, JP;
Kazutaka Yanagita, Tsukuba, JP;
Takashi Kameoka, Tsukuba, JP;
Yuki Kumamoto, Tsukuba, JP;
Kazuma Suzuki, Tsukuba, JP;
Mikio Goto, Tokyo, JP;
Abstract
The present invention provides a supply system enabling a precursor of a solid material or a precursor of a liquid material to be supplied to a latter process at no higher concentration than required and also at or above a predetermined concentration. A supply systemcomprises: a vesselfor receiving a precursor material; a vessel heating unit for heating the vessel at a set temperature; a carrier gas heating unit which is disposed in an introduction line Land heats a carrier gas; a main measurement unit which is disposed in an outward conduction line Land obtains data relating to a gas of the precursor; and a carrier gas temperature control unit for controlling the temperature of the carrier gas heating unit in accordance with a measurement result of the main measurement unit.