The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Mar. 26, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Dhritiman Subha Kashyap, Bangalore, IN;
Amit Rajendra Sherekar, Bangalore, IN;
Kartik Shah, Saratoga, CA (US);
Ashutosh Agarwal, San Jose, CA (US);
Eric J. Hoffmann, San Francisco, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 1/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05B 1/0233 (2013.01); H01L 21/67103 (2013.01);
Abstract
A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.