The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11817576 B1

Date of Patent:

Nov. 14, 2023

Filed:

Feb. 24, 2021

Integrated lithium deposition with protective layer tool

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Subramanya P. Herle, Mountain View, CA (US);

Dieter Haas, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

PATTERSON + SHERIDAN, LLP

Primary Examiner:

Gary D Harris

Int. Cl.

CPC ...

H01M 4/36 (2006.01); H01M 4/38 (2006.01); H01M 4/587 (2010.01); H01M 4/62 (2006.01); B32B 27/08 (2006.01); H01M 4/13 (2010.01); H01M 4/139 (2010.01); C23C 14/56 (2006.01); B32B 27/28 (2006.01); C23C 14/14 (2006.01); B32B 15/08 (2006.01); B32B 7/04 (2019.01); B32B 27/34 (2006.01); B32B 15/09 (2006.01); B32B 27/30 (2006.01); B32B 15/082 (2006.01); B32B 27/36 (2006.01); B32B 7/06 (2019.01); B32B 15/04 (2006.01); B32B 27/40 (2006.01); B32B 15/085 (2006.01); B32B 27/32 (2006.01); B32B 15/088 (2006.01); H01M 4/04 (2006.01); H01M 4/133 (2010.01); H01M 4/134 (2010.01); H01M 4/1393 (2010.01); H01M 4/1395 (2010.01); H01M 10/0525 (2010.01); H01M 4/02 (2006.01);

U.S. Cl.

CPC ...

H01M 4/366 (2013.01); B32B 7/04 (2013.01); B32B 7/06 (2013.01); B32B 15/04 (2013.01); B32B 15/08 (2013.01); B32B 15/082 (2013.01); B32B 15/085 (2013.01); B32B 15/088 (2013.01); B32B 15/09 (2013.01); B32B 27/08 (2013.01); B32B 27/28 (2013.01); B32B 27/281 (2013.01); B32B 27/285 (2013.01); B32B 27/302 (2013.01); B32B 27/308 (2013.01); B32B 27/32 (2013.01); B32B 27/34 (2013.01); B32B 27/36 (2013.01); B32B 27/365 (2013.01); B32B 27/40 (2013.01); C23C 14/14 (2013.01); C23C 14/562 (2013.01); H01M 4/0404 (2013.01); H01M 4/13 (2013.01); H01M 4/133 (2013.01); H01M 4/134 (2013.01); H01M 4/139 (2013.01); H01M 4/1393 (2013.01); H01M 4/1395 (2013.01); H01M 4/364 (2013.01); H01M 4/382 (2013.01); H01M 4/386 (2013.01); H01M 4/587 (2013.01); H01M 4/628 (2013.01); H01M 10/0525 (2013.01); B32B 2270/00 (2013.01); B32B 2307/546 (2013.01); B32B 2307/732 (2013.01); B32B 2307/748 (2013.01); B32B 2457/00 (2013.01); H01M 2004/027 (2013.01);

Abstract

In one implementation, an integrated processing tool for the deposition and processing of lithium metal in energy storage devices. The integrated processing tool may be a web tool. The integrated processing tool may comprises a reel-to-reel system for transporting a continuous sheet of material through the following chambers: a chamber for depositing a thin film of lithium metal on the continuous sheet of material and a chamber for depositing a protective film on the surface of the thin film of lithium metal. The chamber for depositing a thin film of lithium metal may include a PVD system, such as an electron-beam evaporator, a thin film transfer system, or a slot-die deposition system. The chamber for depositing a protective film on the lithium metal film may include a chamber for depositing an interleaf film or a chamber for depositing a lithium-ion conducting polymer on the lithium metal film.

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