The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Mar. 26, 2019
Applicant:
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Inventors:
Nobuhiro Hidaka, Tokyo, JP;
Naoto Kimura, Tokyo, JP;
Assignee:
SUMITOMO OSAKA CEMENT CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01T 23/00 (2006.01); H01L 21/683 (2006.01); C04B 35/117 (2006.01); C04B 35/64 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); C04B 35/117 (2013.01); C04B 35/64 (2013.01); H01J 37/32715 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3834 (2013.01); C04B 2235/3839 (2013.01); C04B 2235/422 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/785 (2013.01); C04B 2235/786 (2013.01); C04B 2235/85 (2013.01); H01J 2237/334 (2013.01);
Abstract
This electrostatic chuck device () includes a base () having one main surface serving as a mounting surface () on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction () provided on the side opposite to the mounting surface () in the base (), in which the base () consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.