The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Jul. 27, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Srinivasa Rao Yedla, Bangalore, IN;
Kirankumar Neelasandra Savandaiah, Bangalore, IN;
Thomas Brezoczky, Los Gatos, CA (US);
Bhaskar Prasad, Jamshedpur, IN;
Nitin Bharadwaj Satyavolu, Kakinada, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A shutter disc for use in a cluster tool assembly having a processing chamber and a transfer arm includes an inner disc and an outer disc configured to be disposed on the inner disc. The inner disc includes a plurality of locating features configured to mate with locating pins of a transfer arm of a cluster tool assembly and a plurality of centering features configured to mate with alignment elements of a substrate support disposed in the processing chamber of the cluster tool assembly.