The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Oct. 21, 2019
Applicant:
Central Glass Company, Limited, Ube, JP;
Inventors:
Assignee:
CENTRAL GLASS COMPANY, LIMITED, Yamaguchi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C07F 7/18 (2006.01); C07F 7/08 (2006.01); C11D 7/08 (2006.01); C11D 7/26 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); C07F 7/0812 (2013.01); C07F 7/188 (2013.01); C11D 7/08 (2013.01); C11D 7/261 (2013.01); H01L 21/02087 (2013.01); H01L 21/02334 (2013.01);
Abstract
A bevel portion treatment agent composition of the present invention is a bevel portion treatment agent composition containing a silylating agent, which is used for treating a bevel portion of a wafer, in which a surface modification index Y and a surface modification index Z measured by a predetermined procedure have a characteristic of satisfying 0.5≤Y/Z≤1.0.