The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Dec. 01, 2020
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Incheol Song, Hwaseong-si, KR;
Masayuki Tomoyasu, Seongnam-si, KR;
Hongmin Yoon, Hwaseong-si, KR;
Jihyun Lim, Seoul, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32642 (2013.01); H01J 37/32174 (2013.01); H01J 37/32715 (2013.01); H01J 2237/3341 (2013.01);
Abstract
A focus ring includes a first conductive layer having a first thickness and a first specific resistance, a second conductive layer stacked on the first conductive layer, the second conductive layer having a second thickness greater than the first thickness and a second specific resistance greater than the first specific resistance, and a dielectric layer on one of a lower surface of the first conductive layer and an upper surface of the second conductive layer.