The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
May. 26, 2021
Sumitomo Chemical Company, Limited, Tokyo, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
Disclosed are a compound represented by formula (I), a resin and a resist composition: wherein Rrepresents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; Lrepresents a single bond or —CO—O*; Rrepresents an alkyl group, and —CH— included in the group may be replaced by —O— or —CO; Rrepresents a fluorine atom, an alkyl fluoride group or an alkyl group, and —CH— included in the alkyl fluoride group and the alkyl group may be replaced by —O— or —CO—; Rrepresents a hydrogen atom, an alkylcarbonyl group or an acid-labile group; m2 and m3 represent an integer of 1 to 3, m4 represents an integer of 0 to 2, and m5 represents 1 or 2, in which 3≤m2+m3+m4+m5≤5.