The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Oct. 07, 2020
Melexis Technologies NV, Tessenderlo, BE;
Wouter Leten, Mol, BE;
Joris Roels, Ghent, BE;
Xiaoning Jia, Ghent, BE;
Roeland Baets, Deinze, BE;
Gunther Roelkens, Schellebelle, BE;
MELEXIS TECHNOLOGIES NV, Tessenderlo, BE;
Abstract
A gas sensor device () is configured to measure a predetermined gas of interest and comprises an enclosure () comprising a semiconductor substrate () and defining a first cavity (), an optically transmissive second closed cavity () and a third cavity (). The second cavity () is interposed between the first and third cavities (). The first cavity () comprises an inlet port () for receiving a gas under test, an outlet port () for venting the gas under test. The first cavity () also comprises an optical source () and a measurement sensor (). The second cavity () is configured as a gaseous filter comprising a volume of the gas of interest sealingly disposed in the second cavity (), and the third cavity () comprises a reference measurement sensor () disposed therein.