The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Sep. 09, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Takashi Sato, Kanagawa, JP;
Satoshi Mitsugi, Kanagawa, JP;
Assignee:
Kioxia Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/27 (2006.01); G03F 1/42 (2012.01); H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
G01B 11/272 (2013.01); G03F 1/42 (2013.01); H01L 23/544 (2013.01); H01L 2223/54426 (2013.01);
Abstract
According to one embodiment, a template includes an alignment mark. The alignment mark includes first marks arranged at a first pitch in a first direction and second marks arranged at a second pitch in the first direction. At least one of the first marks includes a first region and a third region. At least one of the second marks includes a second region and the third region. The first region has first patterns arranged in a line-and-space form in the first direction. The second region has second patterns arranged in a line-and-space form in a second direction orthogonal to the first direction.