The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Mar. 29, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Nolan Zimmerman, Kalispell, MT (US);
Gregory J. Wilson, Kalispell, MT (US);
Andrew Anten, Whitefish, MT (US);
Richard W. Plavidal, Kalispell, MT (US);
Eric J. Bergman, Kalispell, MT (US);
Tricia Youngbull, Kalispell, MT (US);
Timothy Gale Stolt, Kalispell, MT (US);
Sam Lee, Kalispell, MT (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems for cleaning electroplating system components may include an electroplating apparatus including a plating bath vessel. The electroplating apparatus may include a rinsing frame extending above the plating bath vessel. The rinsing frame may include a rim extending circumferentially about an upper surface of the plating bath vessel and defining a rinsing channel between the rim and the upper surface of the plating bath vessel. The electroplating apparatus may also include a rinsing assembly including a splash guard that is translatable from a recessed first position to a second position extending at least partially across an access to the plating bath vessel. The rinsing assembly may also include a fluid nozzle extending from the rinsing frame.