The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Jun. 01, 2018
Applicant:
Warner Babcock Institute for Green Chemistry, Llc, Mill Valley, CA (US);
Inventors:
John C. Warner, Mill Valley, CA (US);
Emily Stoler, Mill Valley, CA (US);
Dwight Tshudy, Mill Valley, CA (US);
David Wolf, Mill Valley, CA (US);
Assignee:
Warner Babcock Institute for Green Chemistry, LLC, Mill Valley, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/12 (2006.01); C23C 18/14 (2006.01); C23C 18/06 (2006.01); H01L 21/02 (2006.01); H01L 29/24 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1216 (2013.01); C23C 18/06 (2013.01); C23C 18/127 (2013.01); C23C 18/1254 (2013.01); C23C 18/143 (2019.05); C23C 18/145 (2019.05); H01L 21/02 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 29/24 (2013.01); H01L 29/66 (2013.01);
Abstract
Described herein is a technology for the creation of 'smooth' metal oxide films or coatings using organic cross-linking agents to enable low-temperature sintering. These metal oxide films can be used in conjunction with low-melting temperature substrates, such as plastics, metal, metal oxide, and glass, providing exquisite control over surface roughness.