The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Apr. 18, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Simon Lau, Alzenau, DE;
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/50 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
C23C 14/50 (2013.01); C23C 16/4581 (2013.01); C23C 16/4583 (2013.01); C23C 16/4586 (2013.01); H01L 21/6838 (2013.01); H01L 21/6875 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); C23C 14/228 (2013.01);
Abstract
The present disclosure provides a holding arrangement. The holding arrangement for holding a substrate includes: a body portion having a first side; a dry adhesive material provided on the first side of the body portion; a seal surrounding the dry adhesive material and configured to provide a vacuum region on the first side, wherein the dry adhesive material is provided in the vacuum region; and a conduit to evacuate the vacuum region.