The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 2023

Filed:

Sep. 28, 2016
Applicant:

Vanguard International Semiconductor Singapore Pte. Ltd., Singapore, SG;

Inventors:

Aveek Nath Chatterjee, Singapore, SG;

Rakesh Kumar, Singapore, SG;

Jaime Viegas, Singapore, SG;

Mateusz Tomasz Madzik, Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); H01L 41/047 (2006.01); H10N 30/87 (2023.01); H10N 30/00 (2023.01); H10N 30/20 (2023.01); B06B 1/02 (2006.01); G10K 11/34 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0629 (2013.01); B06B 1/0238 (2013.01); B06B 1/0622 (2013.01); G10K 11/345 (2013.01); H10N 30/1051 (2023.02); H10N 30/2047 (2023.02); H10N 30/87 (2023.02); H10N 30/872 (2023.02); B06B 2201/55 (2013.01);
Abstract

Provided in accordance with the herein described exemplary embodiments are piezo micro-machined ultrasonic transducers (pMUTs) each having a first electrode that includes a first electrode portion and a second electrode portion. The second electrode portion is separately operable from the first electrode portion. A second electrode is spaced apart from the first electrode and defines a space between the first electrode and the second electrode. A piezoelectric material is disposed in the space. Also provided are arrays of pMUTs wherein individual pMUTs have first electrode portions operably associated with array rows and second electrode portions operably associated with array columns.


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