The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2023

Filed:

Apr. 13, 2021
Applicants:

Denso Corporation, Kariya, JP;

Hamamatsu Photonics K.k., Hamamatsu, JP;

National University Corporation Tokai National Higher Education and Research System, Nagoya, JP;

Inventors:

Chiaki Sasaoka, Nagoya, JP;

Jun Kojima, Nagoya, JP;

Shoichi Onda, Nagoya, JP;

Masatake Nagaya, Kariya, JP;

Kazukuni Hara, Kariya, JP;

Daisuke Kawaguchi, Hamamatsu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 21/02 (2006.01); H01L 29/20 (2006.01); H01L 29/45 (2006.01); H01L 29/40 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02389 (2013.01); H01L 21/0254 (2013.01); H01L 21/02694 (2013.01); H01L 21/30625 (2013.01); H01L 29/2003 (2013.01); H01L 29/401 (2013.01); H01L 29/454 (2013.01);
Abstract

A gallium nitride semiconductor device includes: a chip formation substrate made of gallium nitride and having one surface and an other surface opposite to the one surface; a one surface side element component disposed on the one surface and providing a component of an one surface side of a semiconductor element; and a metal film constituting a back surface electrode in contact with the other surface. The other surface has an irregularity provided by a plurality of convex portions with a trapezoidal cross section and a plurality of concave portions located between the convex portions; and an upper base surface of the trapezoidal cross section in each of the plurality of convex portions is opposed to the one surface.


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