The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2023
Filed:
Aug. 12, 2020
Applicant:
Mcmaster University, Hamilton, CA;
Inventors:
Assignee:
McMaster University, Hamilton, CA;
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/134 (2006.01); G02B 6/12 (2006.01); H05B 3/12 (2006.01); H05B 1/02 (2006.01);
U.S. Cl.
CPC ...
G02B 6/1347 (2013.01); G02B 6/12007 (2013.01); H05B 1/0233 (2013.01); H05B 3/12 (2013.01); G02B 2006/12138 (2013.01); G02B 2006/12142 (2013.01); G02B 2006/12145 (2013.01); G02B 2006/12169 (2013.01);
Abstract
Methods for post-fabrication trimming of a silicon ring resonator are disclosed. Methods include fabricating a heating element, positioned within 2 microns of the silicon ring resonator, subjecting the silicon ring resonator to energetic ion implantation, and annealing the silicon ring resonator, using the heating element. The energetic ion implantation shifts a resonance of the silicon ring resonator towards the red side of the electro-magnetic spectrum. The annealing shifts the resonance of the silicon ring resonator towards the blue side of the electro-magnetic spectrum.