Compact on-chip polarization splitter-rotator based on bezier curve gradient waveguide

Abstract

Disclosed is a compact on-chip polarization splitter-rotator based on a Bezier curve gradient waveguide. The Bezier curve gradient waveguide structure is a standard SOI-based wafer structure, comprising a substrate, of which the bottom layer is buried with oxide (SiO), and the top is composed of silicon waveguides, including a common output waveguide and a specially-structured waveguide containing Bessel curve boundaries. The common waveguide structure is composed of a cuboid waveguide, and the specially-structured waveguide is composed of an input region, an output region, a width-gradient waveguide (Bezier curve gradient structure) and a coupling region, where a width of the gradient waveguide is determined by a third-order Bezier curve, and the coupling region is composed of two asymmetrical waveguide regions.