The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2023
Filed:
May. 13, 2021
Applicant:
Ichor Systems, Inc., Fremont, CA (US);
Inventor:
Stephen Carson, Woodstock, NY (US);
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16J 15/06 (2006.01); F16J 15/10 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16J 15/061 (2013.01); F16J 15/104 (2013.01); H01L 21/67017 (2013.01); Y10T 29/49872 (2015.01);
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal insertion tools may be used to facilitate installation of the seals to permit efficient assembly of fluid flow components into apparatus for controlling flow.