The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2023
Filed:
Jul. 04, 2018
Applicant:
Adeka Corporation, Tokyo, JP;
Inventors:
Assignee:
ADEKA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 11/00 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C07F 11/00 (2013.01); C23C 16/405 (2013.01); C23C 16/45553 (2013.01); H01L 21/0228 (2013.01); H01L 21/02175 (2013.01); H01L 21/02205 (2013.01);
Abstract
The present invention provides a tungsten compound represented by the following general formula (1): (in the formula, X represents a halogen atom, Rto Reach independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, Rrepresents a tertiary butyl group or a tertiary pentyl group, and Rrepresents an alkyl group having 1 to 5 carbon atoms. However, when Rto Rare all hydrogen atoms and Ris a tertiary butyl group, and when Rto Rare all methyl groups and Ris a tertiary butyl group, Rrepresents an alkyl group having 1 to 3 or 5 carbon atoms).