The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2023
Filed:
Dec. 11, 2020
Applicant:
Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;
Inventors:
Assignee:
VON ARDENNE ASSET GMBH & CO. KG, Dresden, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); H01L 21/67748 (2013.01);
Abstract
According to various aspects of the disclosure, a method may comprise: varying a drive force, by which a chamber valve of a vacuum chamber is held closed, when the vacuum chamber has been evacuated; and aerating the vacuum chamber after the variation of the drive force; transporting a substrate through the chamber valve when the chamber valve has been opened.