The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2023

Filed:

Sep. 06, 2019
Applicant:

National University of Singapore, Singapore, SG;

Inventors:

Kian Ping Loh, Singapore, SG;

Sock Mui Poh, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11C 16/04 (2006.01); G11C 11/22 (2006.01); C23C 14/06 (2006.01); C23C 14/30 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); H01L 21/02 (2006.01); H10N 70/00 (2023.01); H01L 29/872 (2006.01);
U.S. Cl.
CPC ...
G11C 11/22 (2013.01); C23C 14/0623 (2013.01); C23C 14/30 (2013.01); C23C 14/541 (2013.01); C23C 14/542 (2013.01); C23C 14/56 (2013.01); H01L 21/02568 (2013.01); H10N 70/028 (2023.02); H10N 70/841 (2023.02); H10N 70/8825 (2023.02); H01L 29/872 (2013.01);
Abstract

A continuous thin film comprises a metal chalcogenide, wherein the metal is selected from the periodic groups 13 or 14 and the chalcogen is: sulphur (S), selenide (Se), or tellurium (Te), and wherein the thin film has a thickness of less than 20 mm. Methods of forming the continuous thin film involve thermally evaporating precursors to form a thin film on the surface of a substrate. In a particular embodiment, molecular beam epitaxy (MBE) is used to grow indium selenide (In2Se3) thin film from two precursors (In2Se3 and Se) and the thin film is used to fabricate a ferroelectric resistive memory device.


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