The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2023

Filed:

May. 12, 2022
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Kazuyuki Nagata, Minowa-machi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/18 (2013.01); G01P 15/125 (2006.01); G01P 3/48 (2006.01);
U.S. Cl.
CPC ...
G01P 15/18 (2013.01); G01P 15/125 (2013.01); G01P 3/48 (2013.01);
Abstract

An inertial sensor is an inertial sensor for detecting a physical quantity based on a displacement in a Z axis when defining three axes perpendicular to each other as an X axis, a Y axis, and the Z axis, and is provided with a substrate, a movable body which is fixed to the substrate, oscillates around an oscillation axis along the X axis, and has two planes opposed to each other and side surfaces connecting the two planes to each other, and a limiter which is fixed to the substrate, and is opposed to the side surfaces of the movable body, wherein the movable body is provided with a resilient portion in a portion opposed to the limiter.


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