The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2023
Filed:
Mar. 31, 2022
Korea Electronics Technology Institute, Seongnam-si, KR;
Dae Sung Lee, Yongin-si, KR;
Kwang Bum Park, Seongnam-si, KR;
KOREA ELECTRONICS TECHNOLOGY INSTITUTE, Seongnam-si, KR;
Abstract
Disclosed is a photoionization gas sensor including an ultraviolet generating module having a first substrate, a second substrate, and a third substrate sequentially coupled in a vertical direction, and configured to generate ultraviolet by applying an electric field to a noble gas filling a first cavity, the first cavity formed in a central portion of the second substrate, and a measuring module configured to collect an electrical signal, the electrical signal being generated such that an electric field is applied to a passage, through which gas ionized by ultraviolet passes, so as to allow the ionized gas to come into contact with an electrode, thereby having a small volume and being operated at a low voltage.