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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11800804 B1

PDFFull Text
Date of Patent:
Oct. 24, 2023

Filed:

Aug. 26, 2022

Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut)

Applicant:

The Regents of the University of California, Oakland, CA (US);

Inventors:

Bernhard Boser, Berkeley, CA (US);

David Horsley, Albany, CA (US);

Richard Przybyla, Berkeley, CA (US);

Ofer Rozen, Davis, CA (US);

Stefon Shelton, Oakland, CA (US);

Assignee:

THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US);

Attorneys:

O'BANION & RITCHEY LLP

John P. O'Banion

Primary Examiner:

Vu A Vu

Int. Cl.
CPC ...
H01L 21/34 (2006.01); H10N 30/085 (2023.01); B06B 1/06 (2006.01); G10K 9/122 (2006.01); G10K 13/00 (2006.01); H10N 30/50 (2023.01); H10N 30/082 (2023.01); H10N 30/30 (2023.01); H10N 30/853 (2023.01); H10N 30/20 (2023.01); G10K 9/12 (2006.01);
U.S. Cl.
CPC ...
H10N 30/085 (2023.02); B06B 1/0622 (2013.01); B06B 1/0666 (2013.01); G10K 9/121 (2013.01); G10K 9/122 (2013.01); G10K 13/00 (2013.01); H10N 30/082 (2023.02); H10N 30/2047 (2023.02); H10N 30/308 (2023.02); H10N 30/50 (2023.02); H10N 30/853 (2023.02);
Abstract

A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.

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