The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
May. 30, 2017
Applicant:
Soitec, Bernin, FR;
Inventor:
Marcel Broekaart, Theys, FR;
Assignee:
SOITEC, Bernin, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/312 (2013.01); H01L 41/08 (2006.01); H03H 3/10 (2006.01); H03H 9/02 (2006.01); H10N 30/072 (2023.01); H10N 30/00 (2023.01);
U.S. Cl.
CPC ...
H10N 30/072 (2023.02); H03H 3/10 (2013.01); H03H 9/02543 (2013.01); H03H 9/02574 (2013.01); H10N 30/1051 (2023.02); H10N 30/10516 (2023.02);
Abstract
A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a first free surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer, wherein the useful layer comprises an area of nanocavities.