The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Apr. 09, 2020
Applicant:
Kyocera Tikitin Oy, Espoo, FI;
Inventors:
Antti Jaakkola, Espoo, FI;
Panu Koppinen, Espoo, FI;
Assignee:
KYOCERA Tikitin Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); B81B 7/00 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02338 (2013.01); B81B 7/0009 (2013.01); H03H 9/2447 (2013.01); H03H 2009/02291 (2013.01);
Abstract
A microelectromechanical (MEMS) resonator includes a resonator structure having a plurality of beam elements and connection elements with certain geometry, where the plurality of beam elements are positioned adjacent to each other and adjacent beam elements are mechanically connected to each other by the connection elements, where the geometry of the beam elements or the connection elements varies within the resonator structure.