The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
May. 28, 2021
Applicant:
University of Central Florida Research Foundation, Inc., Orlando, FL (US);
Inventors:
Omar Saad Ahmed, Orlando, FL (US);
Tengfei Jiang, Orlando, FL (US);
Assignee:
University of Central Florida Research Foundation, Inc., Orlando, FL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H01L 21/66 (2006.01); H01L 23/15 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
H01L 21/486 (2013.01); H01L 21/4864 (2013.01); H01L 22/32 (2013.01); H01L 23/15 (2013.01); H01L 23/49827 (2013.01);
Abstract
A method for isolating at least one conductive via from a surrounding glass substrate is provided. A support layer is formed over at least one surface of the glass substrate. Thereafter, the glass substrate is removed. As a result, the at least one conductive via can be analyzed without interference from the glass substrate.