The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Oct. 09, 2020
Applicant:

The Regents of the University of Michigan, Ann Arbor, MI (US);

Inventors:

Parag Deotare, Ann Arbor, MI (US);

Zidong Li, Ann Arbor, MI (US);

Kanak Datta, Ann Arbor, MI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/308 (2006.01); G06T 7/00 (2017.01); H01L 21/66 (2006.01); G01R 31/311 (2006.01); G01R 31/265 (2006.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); G01R 31/2656 (2013.01); G01R 31/308 (2013.01); G01R 31/311 (2013.01); H01L 22/20 (2013.01); G06T 2207/30148 (2013.01); H01L 22/12 (2013.01); H01L 22/14 (2013.01); H01L 2924/00 (2013.01);
Abstract

The present disclosure relates to non-destructive methods for collecting data from three-dimensional objects. Method include directing one or more interrogating beams of light towards a surface of a three-dimensional object, where the three-dimensional object includes one or more underlying surfaces, and one or more materials having excitonic properties are disposed on the surface of the three-dimensional object; capturing, using an imaging device, optic response of the one or more materials having excitonic properties to the one or more interrogation beams; and computing, using the imaging device, a distance between the one or more underlying surfaces and the one or more materials having excitonic properties, where the optic response of the one or more materials having excitonic properties is a function of the distance between the one or more materials having excitonic properties and the one or more underlying surfaces.


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