The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Sep. 03, 2021
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Kosuke Takai, Yokohama Kanagawa, JP;
Shingo Kanamitsu, Kawasaki Kanagawa, JP;
Noriko Sakurai, Yokohama Kanagawa, JP;
Assignee:
Kioxia Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B21D 22/02 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B21D 22/02 (2013.01); H01J 37/3174 (2013.01);
Abstract
A template according to the present embodiment is a template used in a lithography process of a semiconductor manufacturing process. A first substrate includes a first face, a second face protruded from a portion of the first face, and a lateral face being a lateral face positioned between the second face and the first face and inclined with respect to the second face at a connection portion to the second face. A first material film is provided at least on the lateral face.