The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Jun. 18, 2020
Applicant:

Beijing Voyager Technology Co., Ltd., Beijing, CN;

Inventors:

Youmin Wang, Mountain View, CA (US);

Yufeng Wang, Mountain View, CA (US);

Qin Zhou, Livermore, CA (US);

Gary Li, Mountain View, CA (US);

Sergio Fabian Almeida Loya, Mountain View, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01S 7/481 (2006.01); B81B 3/00 (2006.01); G02B 1/11 (2015.01); G01S 17/931 (2020.01);
U.S. Cl.
CPC ...
G01S 7/4812 (2013.01); B81B 3/004 (2013.01); G01S 7/4813 (2013.01); G01S 17/931 (2020.01); G02B 1/11 (2013.01); B81B 2201/042 (2013.01);
Abstract

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.


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