The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Nov. 29, 2021
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Pablo Nieves, Pinebluff, NC (US);

Kushagra Sinha, Wappingers Falls, NY (US);

Reinaldo Vega, Mahopac, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 21/66 (2006.01); G01R 31/319 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2891 (2013.01); G01R 31/2884 (2013.01); G01R 31/31905 (2013.01); H01L 22/34 (2013.01);
Abstract

A system includes probe pins each including a probe tip and a plurality of thermocouples arranged such that at least one thermocouple is positioned between a pair of the probe pins. The plurality of thermocouples can be placed adjacent or above a device under test (DUT). The probe tips of the probe pins are placed over a plurality of pads. The plurality of thermocouples are placed adjacent or between the plurality of pads. The at least one thermocouple positioned between the pair of the probe pins can be either a single thermocouple or a thermocouple array.


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