The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Jun. 14, 2021
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventor:

Yumi Hayashi, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/407 (2006.01); G01N 27/22 (2006.01); G01N 27/416 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4074 (2013.01); G01N 27/226 (2013.01); G01N 27/416 (2013.01); G01N 2027/222 (2013.01);
Abstract

According to one embodiment, a gas sensor includes a fixed electrode, and a film structure which covers the fixed electrode, forms a cavity inside the film structure, and includes a sensitive layer formed of an amorphous material containing a metal element, and a cap layer provided on the sensitive layer. The film structure is allowed to be deformed when the sensitive layer absorbs a predetermined gas.


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