The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Dec. 20, 2021
Applicants:

Fujikoshi Machinery Corp., Nagano, JP;

Shinshu University, Nagano, JP;

Inventors:

Keigo Hoshikawa, Nagano, JP;

Toshinori Taishi, Nagano, JP;

Takumi Kobayashi, Nagano, JP;

Yoshio Otsuka, Nagano, JP;

Etsuko Ohba, Nagano, JP;

Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 11/00 (2006.01); C30B 29/16 (2006.01);
U.S. Cl.
CPC ...
C30B 11/003 (2013.01); C30B 29/16 (2013.01);
Abstract

A production apparatus for a metal oxide single crystal according to one aspect of the present invention includes: a furnace having an interior heated to a temperature of 1,500° C. or more in an oxidative atmosphere, a heater heating the interior of the furnace, an inlet pipe being disposed in a lower part of the furnace and connecting an interior and an exterior of the furnace, an exhaust pipe being disposed in an upper part of the furnace and connecting an interior and an exterior of the furnace, a duct being disposed above the furnace, and an exhaust fan and a harmful substance elimination device being disposed in the middle of the duct.


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