The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Oct. 15, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventor:

Nolan L. Zimmerman, Kalispell, MT (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/02 (2006.01); C25D 21/10 (2006.01); H01L 21/288 (2006.01);
U.S. Cl.
CPC ...
C25D 17/02 (2013.01); C25D 21/10 (2013.01); H01L 21/2885 (2013.01);
Abstract

Electroplating systems according to embodiments of the present technology may include a plating chamber configured to deposit metal material onto substrates positioned in the plating chamber. The plating chamber may include a rotor and a vessel. The electroplating systems may include at least one of baffle positioned in the plating chamber. The at least one baffle may define a plurality of slots. The at least one baffle may be configured to limit or prevent fluid from splashing the rotor or the plating chamber during operation of the plating chamber.


Find Patent Forward Citations

Zimmerman, Nolan. (2023). Paddle chamber with anti-splashing baffles (U.S. Patent No. 11795566). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11795566

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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