The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Jul. 17, 2018
Applicant:
Komico Ltd., Anseong-si, KR;
Inventors:
Dae-Hoon Jang, Seoul, KR;
Hyunchul Ko, Anseong-si, KR;
Dong-Joo Kim, Yongin-si, KR;
Sang-Gyu Park, Anseong-si, KR;
Jin-Soo Park, Cheonan-si, KR;
Assignee:
KOMICO LTD., Anseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 24/04 (2006.01);
U.S. Cl.
CPC ...
C23C 24/04 (2013.01);
Abstract
Disclosed is an aerosol-deposition-coating method for plasma-resistant coating, in which the inside of a processing device can be protected from plasma during a plasma-etching process, the roughness of a coating layer on a metal substrate can be decreased to thereby reduce the generation of particles, and adhesion between the coating layer and the metal substrate can be enhanced.